Semiconductor devices - Micro-electromechanical devices - Part 41: RF MEMS circulators and isolators
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 41: Circulateurs et isolateurs a MEMS RF)

Norma vydána dne 15.6.2021

Semiconductor devices - Micro-electromechanical devices - Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

Norma vydána dne 16.9.2022

Semiconductor devices - Micro-electromechanical devices - Part 43: Test method of electrical characteristics after cyclic bending deformation for flexible micro-electromechanical devices

Norma vydána dne 19.3.2024

Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

Norma vydána dne 22.2.2024

Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures

Norma vydána dne 20.3.2025

Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane

Norma vydána dne 23.4.2025

Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures

Norma vydána dne 23.8.2024

Semiconductor devices - Micro-electromechanical devices - Part 48: Test method for determining solution concentration by optical absorption using MEMS fluidic device

Norma vydána dne 7.6.2024

Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers

Norma vydána dne 25.11.2025

Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
(Dispositifs a semiconducteurs - Dispositifs microelectromecaniques - Partie 5: Commutateurs MEMS-RF)

Norma vydána dne 13.7.2011