Semiconductor devices—Micro-electromechanical devices—Part 3: Thin film standard test piece for tensile testing
K dispozici od: listopad 2026

Norma vydána dne 30.4.2026

Semiconductor devices—Micro-electromechanical devices—Part 35: Test method of electrical characteristics under bending deformation for flexible electro-mechanical devices
K dispozici od: únor 2027

Norma vydána dne 30.7.2026

Semiconductor devices—Micro-electromechanical devices—Part 36: Environmental and dielectric withstand test methods for MEMS piezoelectric thin films
K dispozici od: únor 2027

Norma vydána dne 30.7.2026

Semiconductor devices—Micro-electromechanical devices—Part 38: Test method for adhesion strength of metal powder paste in MEMS interconnection
K dispozici od: únor 2027

Norma vydána dne 30.7.2026

Semiconductor devices—Micro-electromechanical devices—Part 40: Test methods of MEMS inertial shock switch threshold
K dispozici od: únor 2027

Norma vydána dne 30.7.2026

Semiconductor devices—Micro-electromechanical devices—Part 5: RF MEMS switches

Norma vydána dne 23.5.2023

Semiconductor devices—Micro-electromechanical devices—Part 6: Axial fatigue testing methods of thin film materials
K dispozici od: únor 2027

Norma vydána dne 30.7.2026

Semiconductor devices—Micro-electromechanical devices—Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Norma vydána dne 23.5.2023

Semiconductor devices—Micro-electromechanical devices—Part 8: Strip bending test method for tensile property measurement of thin films
K dispozici od: únor 2027

Norma vydána dne 30.7.2026

Test methods for the performance of solar collectors

Norma vydána dne 31.12.2021