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ASTM F390-98
Standard Test Method for Sheet Resistance of Thin Metallic Films With a Collinear Four-Probe Array
Automaticky přeložený název:
Standardní zkušební metoda pro plošný odpor tenkých kovových filmů s Array Kolineární Čtyř- Probe
NORMA vydána dne 10.5.1998
Informace o normě:
Označení normy: ASTM F390-98
Poznámka: NEPLATNÁ
Datum vydání normy: 10.5.1998
Kód zboží: NS-55132
Počet stran: 4
Přibližná hmotnost: 12 g (0.03 liber)
Země: Americká technická norma
Kategorie: Technické normy ASTM
Anotace textu normy ASTM F390-98 :
Keywords:
Four-probe method, Metals and metallic materials-electronic components/devices, Probe methods-four-probe array, Resistance and resistivity (electrical)-semiconductors, thin films, thin conductive films, thin metallic films, ICS Number Code 77.040.99 (Other methods of testing metals)
Doplňující informace
| 1. Scope | ||||
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1.1 This test method covers the measurement of the sheet resistance of metallic thin films with a collinear four-probe array. It is intended for use with rectangular metallic films between 0.01 and 100 [mu]m thick, formed by deposition of a material or by a thinning process and supported by an insulating substrate, in the sheet resistance range from 10 to 10 [omega]/[open-box] (see 3.1.3). 1.2 This test method is suitable for referee measurement purposes as well as for routine acceptance measurements. 1.3 The values stated in Si units are to be regarded as the standard. The values given in parentheses are for information only. 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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| 2. Referenced Documents | ||||
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