ASTM F1438-93(2012)

5.1 The use of STM images and data is for purposes of textural quality assessment and calculation of figures of merit, and for high purity gas system clean room components.

5.2 This test method defines a standard data presentation format and suggests figures of merit that utilize STM's ability to analyze three-dimensional surface features.

1.1 The purpose of this test method is to define a method for analyzing the surface texture of the above-mentioned components using a scanning tunneling microscope (STM). STM is a noncontact method of surface profiling that can measure three-dimensional surface features in the nanometer size range, which can then be used to represent the surface texture or to provide figures of merit. Application of this test method, where surface texture is used as a selection criterion, is expected to yield comparable data among different components tested.

1.2 Limitations:

1.3 This technique is written with the assumption that the STM operator understands the use of the instrument, its governing principles, and any artifacts that can arise. Discussion of these points is beyond the scope of this test method.

1.4 The values stated in SI units are to be regarded as the standard.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.