ASTM F1394-92(2020)

4.1 The purpose of this test method is to define a procedure for testing components intended for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for the purposes of qualification for this installation.

4.2 Background Testing—This test method uses background testing to ensure that the system is not contributing particles above a low, acceptable level. This ensures that counts seen are from the test device, not from a contaminated system. The techniques used to obtain background counts do not produce conditions identical to the conditions existing when a test device is in place. It is recommended that the control products be run periodically to see that they give consistent results. These control products should be the lowest particle release products. They will be additional proof that the system is not contributing excess particles during the static, dynamic, or impact portions of the test.

4.3 This test method can be used for testing lengths of tubing. The flow criteria will be identical to that indicated for valves. A tubing test would only include the static background, the impact background, and the static and impact portions of the method. A dynamic portion could be added by actuating the upstream pneumatic valve (PV1), thus creating a flow surge to the test length of tubing.

1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.

1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm (¹/₄ through ¹/₂-in.) size. For applications of this test method to larger valves, see the table in the appendix.

1.3 Limitations: 

1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. 1.6 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.