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ISO 14644-12:2018
Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
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NORMA vydána dne 30.8.2018
Informace o normě:
Označení normy: ISO 14644-12:2018
Datum vydání normy: 30.8.2018
Kód zboží: NS-858670
Počet stran: 11
Přibližná hmotnost: 33 g (0.07 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO
Kategorie - podobné normy:
Anotace textu normy ISO 14644-12:2018 :
Description / Abstract: This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered. The monitoring given in this document is for use mainly in "operational" states. NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale. NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc. NOTE 3 Health and safety considerations are excluded from this document.
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