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Standard Test Method for Thickness of Epitaxial or Diffused Layers in Silicon by the Angle Lapping and Staining Technique (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).
Automaticky přeložený název:
Standardní zkušební metoda pro Tloušťka epitaxního nebo rozptýlené Vrstvy v Silicon úhlem lapování a obarvením Technique (Withdrawn 2003 )
NORMA vydána dne 10.12.2000
Označení normy: ASTM F110-00a
Poznámka: NEPLATNÁ
Datum vydání normy: 10.12.2000
Kód zboží: NS-49130
Počet stran: 4
Přibližná hmotnost: 12 g (0.03 liber)
Země: Americká technická norma
Kategorie: Technické normy ASTM
Keywords:
angle lapping, diffused layer, epitaxial layer, etching, fringe count, staining, thickness, ICS Number Code 29.045 (Semiconducting materials)
1. Scope |
This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This test method covers a procedure suitable for interlaboratory comparisons of layer thickness. This test method is applicable for layers of any resistivity so long as the layer differs from the silicon substrate under it either in conductivity type or in resistivity by at least one order of magnitude. The method described is destructive in nature but is more widely applicable than the alternate infrared method, Test Method F95. 1.2 For layers with thicknesses between 1 and 25 µm, an interlaboratory precision as defined in Practice E177, of +(0.15 T + 0.5 µm) (3S) can be achieved where T represents thickness expressed in micrometres. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 8. |
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