ISO 14706:2014-ed.2.0

Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy

NORMA vydána dne 25.7.2014

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The information about the standard:

Designation standards: ISO 14706:2014-ed.2.0
Publication date standards: 25.7.2014
The number of pages: 25
Approximate weight : 75 g (0.17 lbs)
Country: International technical standard
Kategorie: Technické normy ISO