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ISO/TR 19319:2013-ed.2.0

Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

NORMA vydána dne 6.3.2013

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Informace o normě:

Označení normy: ISO/TR 19319:2013-ed.2.0
Datum vydání normy: 6.3.2013
Počet stran: 116
Přibližná hmotnost: 379 g (0.84 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO

Anotace textu normy ISO/TR 19319:2013-ed.2.0 :

Description / Abstract: ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.