Determination of modulation period of nano-multilayer coatings by low-angle X-ray methods
NORMA vydána dne 22.7.2022
Označení normy: ISO 24688:2022
Datum vydání normy: 22.7.2022
Počet stran: 8
Přibližná hmotnost: 24 g (0.05 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO
Description / Abstract: This document specifies the substrate conditions and testing of the modulation period (including the principles for low-angle X-ray methods, the requirements of the coatings, the requirements for X-ray measuring apparatus, the calibration of apparatus and samples, and the testing conditions and calculation process) of nano-multilayer coatings by low-angle X-ray methods including X-ray reflectivity (XRR) and glancing incident X-ray diffraction (GIXRD).