ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

NORMA vydána dne 24.8.2020

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The information about the standard:

Designation standards: ISO 22278:2020
Publication date standards: 24.8.2020
The number of pages: 29
Approximate weight : 87 g (0.19 lbs)
Country: International technical standard
Kategorie: Technické normy ISO

Annotation of standard text ISO 22278:2020 :

Description / Abstract: This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.