Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
NORMA vydána dne 6.12.2023
Označení normy: ISO 21360-6:2023
Datum vydání normy: 6.12.2023
Počet stran: 12
Přibližná hmotnost: 36 g (0.08 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO
Description / Abstract: This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.