Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
NORMA vydána dne 24.7.2003
Designation standards: ISO 20341:2003
Publication date standards: 24.7.2003
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: International technical standard
Kategorie: Technické normy ISO
Description / Abstract: ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.