Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials
NORMA vydána dne 24.7.2003
Označení normy: ISO 20341:2003
Datum vydání normy: 24.7.2003
Počet stran: 5
Přibližná hmotnost: 15 g (0.03 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO
Description / Abstract: ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.