ISO 19383:2026

Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors

NORMA vydána dne 1.6.2026

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The information about the standard:

Designation standards: ISO 19383:2026
Publication date standards: 1.6.2026
The number of pages: 13
Approximate weight : 39 g (0.09 lbs)
Country: International technical standard
Kategorie: Technické normy ISO

Annotation of standard text ISO 19383:2026 :

Description / Abstract: This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.