Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
NORMA vydána dne 28.2.2024
Označení normy: ISO 18118:2024-ed.3.0
Datum vydání normy: 28.2.2024
Počet stran: 22
Přibližná hmotnost: 66 g (0.15 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO
Description / Abstract: This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.