Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
NORMA vydána dne 18.7.2016
Označení normy: ISO 16700:2016-ed.2.0
Datum vydání normy: 18.7.2016
Počet stran: 18
Přibližná hmotnost: 54 g (0.12 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO
Description / Abstract: ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.