Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
NORMA vydána dne 14.8.2020
Designation standards: ISO 16413:2020-ed.2.0
Publication date standards: 14.8.2020
The number of pages: 32
Approximate weight : 96 g (0.21 lbs)
Country: International technical standard
Kategorie: Technické normy ISO