Surface chemical analysis — Sputter depth profiling — Optimization using layered systems as reference materials

Informace o normě:

Označení normy: ISO 14606:2022-ed.3.0
Datum vydání normy: 21.11.2022
Počet stran: 17
Přibližná hmotnost: 51 g (0.11 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO

Anotace textu normy ISO 14606:2022-ed.3.0 :

Description / Abstract: This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry. This document is not intended to cover the use of special multilayered systems such as delta doped layers.