
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of boron atomic concentration in silicon using uniformly doped materials
NORMA vydána dne 9.7.2010
Designation standards: ISO 14237:2010-ed.2.0
Publication date standards: 9.7.2010
The number of pages: 19
Approximate weight : 57 g (0.13 lbs)
Country: International technical standard
Kategorie: Technické normy ISO