Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis

The information about the standard:

Designation standards: ISO 13424:2013
Publication date standards: 23.9.2013
The number of pages: 46
Approximate weight : 138 g (0.30 lbs)
Country: International technical standard
Kategorie: Technické normy ISO

Annotation of standard text ISO 13424:2013 :

Description / Abstract: ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.