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ISO 13424:2013

Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis

NORMA vydána dne 23.9.2013

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Informace o normě:

Označení normy: ISO 13424:2013
Datum vydání normy: 23.9.2013
Počet stran: 46
Přibližná hmotnost: 138 g (0.30 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy ISO

Anotace textu normy ISO 13424:2013 :

Description / Abstract: ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.