Determination of geometrical quantities by using of scanning probe microscopes - Calibration of measurement systems.
NORMA vydána dne 1.9.2019
Designation standards: VDI/VDE 2656Blatt1
Publication date standards: 1.9.2019
The number of pages: 81
Approximate weight : 274 g (0.60 lbs)
Country: German technical standard
Kategorie: Technické normy VDI
Bestimmung geometrischer Messgrößen mit Rastersondenmikroskopen - Kalibrierung von Messsystemen.