Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.)
NORMA vydána dne 1.8.2015
Designation standards: UNE-EN 62047-17:2015
Publication date standards: 1.8.2015
The number of pages: 31
Approximate weight : 93 g (0.21 lbs)
Country: Spanish technical standard
Kategorie: Technické normy UNE