
Surface chemical analysis -- Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
NORMA vydána dne 20.3.2005
Designation standards: JIS K0148:2005
Publication date standards: 20.3.2005
The number of pages: 26
Approximate weight : 78 g (0.17 lbs)
Country: Other standards
Kategorie: Technické normy JIS
Japanese Errata (200510)