
Nanomanufacturing - Key control characteristics - Part 9-1: Traceable spatially resolved nano-scale stray magnetic field measurements - Magnetic force microscopy
NORMA vydána dne 14.10.2021
Designation standards: IEC/TS 62607-9-1-ed.1.0
Publication date standards: 14.10.2021
The number of pages: 63
Approximate weight : 189 g (0.42 lbs)
Country: International technical standard
Kategorie: Technické normy IEC
IEC TS 62607-9-1:2021(E) establishes a standardized method to characterize spatially varying magnetic fields with a spatial resolution down to 10 nm for flat magnetic specimens by magnetic force microscopy (MFM). MFM primarily detects the stray field component perpendicular to the sample surface. The resolution is achieved by the calibration of the MFM tip using magnetically nanostructured reference materials.