Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices

The information about the standard:

Designation standards: IEC 62047-44-ed.1.0
Publication date standards: 22.2.2024
The number of pages: 19
Approximate weight : 57 g (0.13 lbs)
Country: International technical standard
Kategorie: Technické normy IEC

Annotation of standard text IEC 62047-44-ed.1.0 :

IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric-field-sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric-field-sensitive devices. The statements made in this document are also applicable to MEMS resonant electric-field-sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.