Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
NORMA vydána dne 22.11.2017
Označení normy: IEC 62047-29-ed.1.0
Datum vydání normy: 22.11.2017
Počet stran: 12
Přibližná hmotnost: 36 g (0.08 liber)
Země: Mezinárodní technická norma
Kategorie: Technické normy IEC
IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.