State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range 10 to 30 nm. Procedure of measurements
NORMA vydána dne 1.1.2012
Designation standards: GOST R 8.716-2010
Publication date standards: 1.1.2012
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: Russian technical standard
Kategorie: Technické normy GOST