
Semiconductor devices—Micro-electromechanical devices—Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
NORMA vydána dne 30.7.2026
Designation standards: GB/T 42709.12-2026
Note: K dispozici od: únor 2027
Publication date standards: 30.7.2026
Country: Chinese technical standard
Kategorie: Technické normy GB