GB/T 29844-2013

Specifications of metrology patterns for the evaluation of advanced photolithgraphy

NORMA vydána dne 12.11.2013

Anglicky a čínsky -
Elektronické PDF (6593.00 CZK)

The information about the standard:

Designation standards: GB/T 29844-2013
Publication date standards: 12.11.2013
Country: Chinese technical standard
Kategorie: Technické normy GB