GB/T 16878-1997

Specification for metrology pattern cells for integrated circuit manufacture

NORMA vydána dne 20.6.1997

Anglicky a čínsky -
Elektronické PDF (9753.30 CZK)

The information about the standard:

Designation standards: GB/T 16878-1997
Publication date standards: 20.6.1997
Country: Chinese technical standard
Kategorie: Technické normy GB