Microelectromechanical devices - Part 3: Thin film standard test piece.
NORMA vydána dne 1.8.2004
Designation standards: E DIN IEC 62047-3:2004-08
Note: NEPLATNÁ
Publication date standards: 1.8.2004
The number of pages: 10
Approximate weight : 30 g (0.07 lbs)
Country: German technical standard
Kategorie: Technické normy DIN
Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe.