BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment.

NORMA vydána dne 19.6.2019

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The information about the standard:

Designation standards: BS ISO 21859:2019
Publication date standards: 19.6.2019
The number of pages: 12
Approximate weight : 36 g (0.08 lbs)
Country: British technical standard
Kategorie: Technické normy BS

Annotation of standard text BS ISO 21859:2019 :

ISBN: 978 0 580 96201 1 Status: Confirmed