
Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors.
NORMA vydána dne 3.6.2026
Designation standards: BS ISO 19383:2026
Publication date standards: 3.6.2026
The number of pages: 22
Approximate weight : 66 g (0.15 lbs)
Country: British technical standard
Kategorie: Technické normy BS
ISBN: 978 0 539 32348 1 Status: Definitive