BS ISO 14706:2014

Surface chemical analysis. Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy.

NORMA vydána dne 31.7.2014

The information about the standard:

Designation standards: BS ISO 14706:2014
Publication date standards: 31.7.2014
The number of pages: 36
Approximate weight : 108 g (0.24 lbs)
Country: British technical standard
Kategorie: Technické normy BS