
Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures.
NORMA vydána dne 28.8.2024
Designation standards: BS IEC 62047-47:2024
Publication date standards: 28.8.2024
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: British technical standard
Kategorie: Technické normy BS
ISBN: 978 0 539 21851 0 Status: Definitive