BS IEC 62047-46:2025

Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane.

NORMA vydána dne 30.4.2025

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The information about the standard:

Designation standards: BS IEC 62047-46:2025
Publication date standards: 30.4.2025
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Kategorie: Technické normy BS

Annotation of standard text BS IEC 62047-46:2025 :

ISBN: 978 0 539 21850 3 Status: Definitive