
Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film.
NORMA vydána dne 9.10.2017
Designation standards: BS IEC 62047-30:2017
Publication date standards: 9.10.2017
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: British technical standard
Kategorie: Technické normy BS
ISBN: 978 0 580 93578 7 Status: Definitive