
Semiconductor devices. Micro-electromechanical devices. Generic specification for MEMS.
NORMA vydána dne 30.11.2010
Designation standards: BS EN 62047-4:2010
Publication date standards: 30.11.2010
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: British technical standard
Kategorie: Technické normy BS
ISBN: 978 0 580 56857 2 Status: Definitive