
Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area.
NORMA vydána dne 30.11.2016
Designation standards: BS EN 62047-25:2016
Publication date standards: 30.11.2016
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: British technical standard
Kategorie: Technické normy BS
ISBN: 978 0 580 85615 0 Status: Definitive