BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices. Test method for Poisson´s ratio of thin film MEMS materials.<

NORMA vydána dne 31.10.2014

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The information about the standard:

Designation standards: BS EN 62047-21:2014
Publication date standards: 31.10.2014
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Kategorie: Technické normy BS

Annotation of standard text BS EN 62047-21:2014 :

ISBN: 978 0 580 77554 3 Status: Definitive