
Semiconductor devices. Micro-electromechanical devices. Bulge test method for measuring mechanical properties of thin films.
NORMA vydána dne 31.7.2015
Designation standards: BS EN 62047-17:2015
Publication date standards: 31.7.2015
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: British technical standard
Kategorie: Technické normy BS
ISBN: 978 0 580 72203 5 Status: Definitive