BS EN 62047-12:2011

Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures.

NORMA vydána dne 30.11.2011

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The information about the standard:

Designation standards: BS EN 62047-12:2011
Publication date standards: 30.11.2011
The number of pages: 34
Approximate weight : 102 g (0.22 lbs)
Country: British technical standard
Kategorie: Technické normy BS

Annotation of standard text BS EN 62047-12:2011 :

ISBN: 978 0 580 76301 4 Status: Definitive