
Semiconductor devices. Micro-electromechanical devices. Micro-pillar compression test for MEMS materials.
NORMA vydána dne 30.9.2011
Designation standards: BS EN 62047-10:2011
Publication date standards: 30.9.2011
The number of pages: 18
Approximate weight : 54 g (0.12 lbs)
Country: British technical standard
Kategorie: Technické normy BS
ISBN: 978 0 580 69447 9 Status: Definitive