Standard Test Method for Bow of Silicon Wafers (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).
NORMA vydána dne 10.12.2002
Designation standards: ASTM F534-02a
Note: NEPLATNÁ
Publication date standards: 10.12.2002
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
bow, silicon, wafers, ICS Number Code 29.045 (Semiconducting materials)