Standard Test Method for Thickness and Thickness Variation of Silicon Wafers (Withdrawn 2003) (Includes all amendments And changes 8/16/2017).
NORMA vydána dne 10.12.2002
Designation standards: ASTM F533-02a
Note: NEPLATNÁ
Publication date standards: 10.12.2002
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
semiconductor, silicon, thickness, thickness variation, total thickness variation, wafer, ICS Number Code 29.045 (Semiconducting materials)