Standard Test Method for Energy Dispersive X-Ray Spectrometer (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components
NORMA vydána dne 1.7.2012
Designation standards: ASTM F1375-92(2012)
Note: NEPLATNÁ
Publication date standards: 1.7.2012
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
components, connectors, contamination, EDX, gas distribution components, SEM/EDX, semiconductor processing, surface condition, tubing, ICS Number Code 17.040.20 (Properties of surfaces)