ASTM E2444-11(2018)

Standard Terminology Relating to Measurements Taken on Thin, Reflecting Films

NORMA vydána dne 1.5.2018

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The information about the standard:

Designation standards: ASTM E2444-11(2018)
Publication date standards: 1.5.2018
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM

Annotation of standard text ASTM E2444-11(2018) :

Keywords:
cantilevers, definitions, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, terminology, test structure,, ICS Number Code 01.040.31 (Electronics (Vocabularies)), 31.240 (Mechanical structures for electronic equipment)