Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
NORMA vydána dne 1.11.2011
Designation standards: ASTM E2245-11
Note: NEPLATNÁ
Publication date standards: 1.11.2011
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM
Keywords:
cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, microelectromechanical systems, MEMS, polysilicon, residual strain, stiction, strain gradient, test structure, ICS Number Code 37.040.20 (Photographic paper, film and plates. Cartridges)