ASTM F907-85E01R92

Test Method for Measurement of Rotational Acceleration of a Wafer for Photoresist Spin Coating

NORMA vydána dne 1.1.1996

Anglicky -
Elektronické PDF (1536.40 CZK)

The information about the standard:

Designation standards: ASTM F907-85E01R92
Note: NEPLATNÁ
Publication date standards: 1.1.1996
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Kategorie: Technické normy ASTM