Standard Test Methods for Measuring Crystallographic Orientation of Flats on Single Crystal Silicon Wafers by X-Ray Techniques

Informace o normě:

Označení normy: ASTM F847-94(1999)
Poznámka: NEPLATNÁ
Datum vydání normy: 1.1.1999
Počet stran: 8
Přibližná hmotnost: 24 g (0.05 liber)
Země: Americká technická norma
Kategorie: Technické normy ASTM

Anotace textu normy ASTM F847-94(1999) :

Keywords:
Angular deviation, Crystal lattice structure, Fiducial flats, Laue method, Nondestructive evaluation (NDE)-Laue method, Single-crystal silicon, Surface analysis-electronic components/devices, X-ray diffraction, crystallographic orientation of flats on single crystal silicon, slices/wafers, by x-ray techniques, test,, Silicon semiconductors-slices/wafers, wafers/slices-crystallographic orientation of flats on single crystals,, by x-ray techniques, test